藍麒科技 SERVICE

Comparison table of cleanliness requirements of various industries
Industries	Applicable field	Cleanliness (Class)
Optical industry	Optical lens, scale engraving, Medical camera, Lens bonding process, Camera assembly,	100100~100,000
Precision Machinery Industry	Optical lens, scale engraving, Medical camera, Lens bonding process, Camera assembly, Micro-scaled imaging, Lens grinding process, Coating, Film manufacturing and drying. Electrical contacts, Mini-bearings, Precision induction devices, Electronic clock components, Precision components, Instruments, Bearings, Clocks & Watches assembly and inspection.	100100~100,000
Electronic & Electric industry	Crystallization & Refining of the semiconductor industry, Etching process, Position adjustment, Surface treatment, Metal evaporation, Integrated circuit, Picture tube, Video recorder, Computer tape, Computer manufacturing, Relay.	100100~100,000
Printing industry	Precision platemaking, Electronic platemaking	10~100100~100,000
Mushroom cultivation	Cultivation of Shiitake fungus, Mushrooms, Agaric.	10,000
Breeding	Prevention of Mold/Fungus contamination.	10,000
Meat processing industry	Milk products manufacturing, Fish cakes, Ham, Mushroom manufacturing, Beverage bottling and capping.	10,000
Hospital & Medical	Sterile operating room, Sterile room, Storage of surgical instruments, Premature infant care, General operating room, Intensive care ward, Pharmacy room, Postoperative Intensive Care Unit/Anesthesia Recovery Room	100~100,000
Clinical Examination	Cultivation of bacteria, mold/fungus, tissue, etc.	10~100100~100,000
Pharmaceutical	Antibiotic, Injection and its sealing bottle, Serum fabricate, Medicine tableting, Blood dispensing, Injection syringe, Bandage, Cosmetics manufacturing.	1001,000~100,000
The clean room has certain specifications for the maximum allowable amount of fine dust particles in a certain space according to different grades. The most commonly used specifications in international standards are Fed-Std-209E

U.S. Federal Standards - 209E Clean room specifications
Grade limit
Grade name		0.1μm Volume unit		0.2μm Volume unit		0.3μm Volume unit		0.5μm Volume unit		5μm Volume unit
SI	Imperial	m3	ft3	m3	ft3	m3	ft3	m3	ft3	m3	ft3
M1		350	9.91	75.7	2.14	30.9	0.876	10.0	0.283	-	-
M1.5	1	1,240	35.0	265	7.50	106	3.00	35.3	1.00	-	-
M2		3,500	99.1	757	21.4	309	8.75	100	2.83	-	-
M2.5	10	12,400	350	2,650	75.0	1,060	30.0	353	10.0	-	-
M3		35,000	991	7,570	214	3,090	87.5	1,000	28.3	-	-
M3.5	100			26,500	750	10,600	300	3,530	100	-	-
M4				75,700	2,140	30,900	875	10,000	283	-	-
M4.5	1000							35,300	1,000	247	7.00
M5								100,000	2,830	618	17.5
M5.5	10000							353,000	10,000	2,470	70
M6								1,000,000	28,300	6,180	175
M6.5	100000							3,530,000	100,000	24,700	700
M7								10,000,000	283,000	61,800	1,750

U.S. Federal Standards - 209D Clean room specifications
Series	Particle size	Number of particles	Pressure		Temperature °C			Humidity %		Wind speed and air exchange rate	Particles
Series	um	Particles/ft3	mmAg	Range	Recommended value	Error value	Max	Lowest	Error value	times/hr	lux
1	≧ 0.5	≦ 1	>1.3	19.4 ～25	22.2	±2.8 special needs ±1.4	45	30	±10 special needs ±5	Layer flow 0.35～0.55m/s	1,080～1,620
1	≧ 5.0	0
10	≧ 0.5	≦ 10
10	≧ 5.0	0
100	≧ 0.5	≦ 100
100	≧ 5.0	≦ 1
1,000	≧ 0.5	≦ 1,000								Turbulence ≧20 次/hr
1,000	≧ 5.0	≦ 10
10,000	≧ 0.5	≦ 10,000
10,000	≧ 5.0	≦ 65
100,000	≧ 0.5	≦ 100,000
100,000	≧ 5.0	≦ 700